Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis

Hemawan, Kadek W.; Yan, Chih S.; Liang, Qi; Lai, Joseph; Meng, Yufei; Krasnicki, Szczesny; Mao, Ho K.; Hemley, Russell J.
2011
IEEE TRANSACTIONS ON PLASMA SCIENCE
DOI
10.1109/TPS.2011.2157531
Plasma-substrate interactions in diamond synthesis via microwave plasma-assisted chemical vapor deposition (CVD) are an important issue in CVD reactor optimization. The hot spot formation observed during single-crystal diamond synthesis in 2.45-GHz cylindrical cavity reactors is examined after long-run deposition.